婧?灏??舵?????舵?????ф????涓???????涓洪??灞??舵??锛?绾???灞??????????????界?锛????????舵??锛??????????????村????绛?锛????剁?峰?????╅?舵??锛?姘у???┿??纭????┿??纰冲???┿??纭????╃?锛?锛???瀵间??跺???堕??涓?00nm锛?8瀵革???浠ヤ??跺???堕????甯镐互???剁?涓轰富锛?浣跨?ㄧ???舵??浠ラ????????绱?涓轰富???朵腑楂?绾?????瀵肩?垫?ф?????纭?宸??浜?锛?浣???瀛??ㄤ?纭??ヨЕ?甸?荤??楂?锛?骞朵??╂?ｈ??ュ?ㄤ欢寮?璧峰?ㄤ欢?ц?藉樊???????甸?荤??杈惧??.7渭惟cm锛?瀵硅捣??浣?涓洪?绘?″???浜?姘у??纭???瓒冲?浣????甸?荤??锛??舵???????????绾???~6涓???9????绾?害??
?ㄥ??瀵间?纭?琛ㄧ?璧峰????杩?姘у??杩?绋?????SiO2浣?涓洪?绘?″?锛???浣?纭?琛ㄩ???涓?灞?涔??寸???绘??锛??绘?????纭?涔??村舰??????锛??ㄩ??涓?绗??灞???涔??磋?搁??涓?灞?缁?缂?锛?IMD锛?浣?涓轰??靛?锛?浠??靛?????涓??????ㄦ哀???┿??姘???纭??????颁??猴?IMD灞???杩????绘????舰???扮??杩??ュ?锛?via锛???濉?(plug)锛???澶?IMD/濉?/??灞?娌?绉??????诲?惧舰??宸ヨ?虹????澶???缁?褰㈡??澶?灞?绯荤???200nm?剁?涓??绘?″???灞?涓???娇?ㄩ?????TiW锛???姘?????锛?TiN锛?锛?TiN灞???互??杩?婧?灏?褰㈡??锛?涔???互婧?灏?Ti????N2??NH3??姘?姘?涓?锛???杩?600??褰㈡????爱??灞?锛???iN灞?涓?婧?灏?涓?灞?Ti,??楂?涓?纭?琛??寤哄??电????
300nm锛?12瀵革??跺???堕??锛?澶?浣跨?ㄥ??杩?????浜?杩??????涓昏?浣跨?ㄩ?????介?舵????涓轰?纭??浼?澶?缁?灏?甯?绾跨??璐ㄩ??锛?蹇?椤绘??楂??????????????с??浠ュ??99.995%锛?4N5锛????舵??绾?害??互婊¤冻0.35渭mIC??宸ヨ?鸿?姹?锛??板??9.9999%(6N)???舵??绾?害???芥弧瓒冲?跺?0.18渭m绾挎?＄??宸ヨ?鸿?姹?????0涓?绾?0骞翠唬IBM???稿??ラ???哄ぇ椹?＋?╁伐?猴?浠???瀹??板??浠ｉ??????灞???骞跺??ㄥ??00nm?跺???堕??涓????????????甸?荤??楂?浜???锛?淇″?烽??搴﹂??瑕?????锛?瀵肩?垫?ч??涓?瓒筹?????2?卞?澶х??????堕????瑕??撮?垮???寸?????灞?绾匡?????ia?伴??澧???瀵艰?寸?甸?昏?涓?姝ュ??澶э???姝ら??灞?灞?杞????甸?荤??浠?涓?.7渭惟cm????锛????跺?ㄩ??灞?涓???灞?涔??撮???ㄤ?k?煎???MD浠???瀹??版??楂??ц?藉????灏?瑕?姹?????灞?灞??般??300nm?剁?涓????娇?ㄩ?斤?Ta锛???TiN??姘????斤?TaN锛???婧?灏?涓????存?ュ??ㄩ??灞??舵??????a琛ㄩ?㈤??杩?楂?娓?2??NH3?′欢涓???????
?剧????灞?涓????W锛????硷?Mo锛???涓烘??渚?浜?浣????ヨЕ?甸?诲?ㄥぇ瑙?妯″??瓒?澶ц?妯￠?????佃矾瑕?姹?涓????ヨЕ瀛????村ぇ???ㄩ?靛????????琛ㄩ?㈡?ヨЕ?㈢Н??姣???涓哄???斤??????锋??楂????广??楂?瀵肩?垫?с??楂????电Щ?с???稿?哄???ヨ?浜?纭???棰?甯﹂??????ソ????ǔ瀹??х??圭?癸?Mo?锋??楂????广??楂??靛?????杈?浣???姣??绘????杈?濂界?????????у????ソ??????ц?界??圭?癸???姝???Mo??姝ヨ?搴??ㄤ?VLSI??ULSI???夸唬????????瀵肩?靛?涓???
?版?朵唬锛??版??????轰?绌凤???浠??虫敞锛?瀛︿?锛?甯????ㄦ???ヨ?藉?涓??朵勘杩?锛?寮??????般??