婧?灏??挎????????浜???涓?涓?绾?伐涓??虹?涓?????缂虹??绮惧?????????锛??ㄥ?澶?棰???婧?灏??舵?????ョ????瑕???浣??????璁烘???绾?害婧?灏??挎????????灞???璐ㄩ?舵?????????舵?????????╅?舵???藉?ㄥ??澶ц?涓?搴??ㄥ箍娉?锛????ョ????绉?????灞??????虹?????棰???锛???互璇存?灏??舵????澶?涓????
婧?灏?锛?Sputtering锛??????????╃?ㄧ?瀛?婧?浜х????绂诲?锛??ㄩ???绌轰腑缁?杩?????????锛???褰㈡??楂???搴﹁?界??绂诲???娴?锛?杞板?诲?轰?琛ㄩ???绂诲????轰?琛ㄩ?㈠??瀛??????ㄨ?戒氦???浣垮?轰?琛ㄩ?㈢????瀛?绂诲??轰?骞舵?绉??ㄥ?哄?琛ㄩ?㈣??褰㈡????????????琚?桨?荤???轰????????ㄦ?灏?娉?娌?绉?????????????锛?绉颁负婧?灏??舵????
婧?灏??舵???锋??楂?绾?害??楂?瀵?搴︺??澶?缁??????剁?????绛??圭?癸?涓????遍?跺???????跨?????
婧?灏??舵??????绫伙?
??浣跨?ㄧ??????????璐ㄤ???锛?婧?灏??舵??????涓洪??灞?/????灞???璐ㄩ?舵?????????舵?????????╅?舵??绛???婧?灏?????宸ヨ?哄????澶??уソ?????????у?讹????ㄥぇ?㈢Н?烘?挎????涓??峰???搴﹀??????????锛????跺????????锋??绾?害楂????村??уソ绛?浼??癸?宸叉??涓哄?跺???????????涓昏??????涓?锛?婧?灏??舵??浜﹀凡??涓虹????甯??哄??ㄩ????澶х??PVD??????????
婧?灏?????????绌鸿?稿??????????涓绘???涓ょ?PVD?????瑰?锛?PVD???????跺???????????涓昏??????涓?锛? ?ㄤ??跺????????????╄川琚?О涓?VD??????????缁?杩?澶?骞村??灞?锛?PVD?????????骞挎??ㄤ?搴??ㄤ??靛?????瀛︺???烘???寤虹???????绛?棰?????
?版?朵唬锛??版??????轰?绌凤???浠??虫敞锛?瀛︿?锛?甯????ㄦ???ヨ?藉?涓??朵勘杩?锛?寮??????般??
??绛? 婧?灏??舵?? 婧?灏??挎????绫?/a> ?????舵??