纰冲??纭?(SiC)锛?杩?绉?瀹借?介??????瀵间?缁?浠跺???ㄤ??????翠?璐ㄧ???朵?绠★???浠e?浠???纭??????朵?绠★?骞朵?浜???绠″?卞??????锛???渚???浣?娓╁害????楂?棰?????????缁?浠躲?? SiC?朵?绠℃??浜х???????姣?纭??????朵?绠℃?翠?30%锛??惰??锛?瀹????????充?浠??舵?纭??撮?5????
涓轰???浣?SiC???堕???????缇??藉???$??辩撼宸?绔?澶у?????绌朵汉??璁捐?浜?涓?绉?PRESiCE宸ヨ?猴?骞舵????TI X-Fab瀹??颁???????SiC????MOSFET,?ュ??浜?缇??藉??搴?涓捐???2017骞寸⒊??纭????稿?虫?????介??浼?璁?International Conference on Silicon Carbide and Related Materials锛?ICSCRM 2017)??琛ㄦ?????????
涓轰?瀵绘?句???????????宸ヨ?轰互??浣?杩?浜???纰?锛?Baliga???剁??绌跺?㈤??璁捐?浜?涓?绉????堕??SiC?靛?缁?浠朵?宸ョ?宸ヨ?衡??(Process Engineered for Manufacturing SiC Electronic-devices锛?PRESiCE)锛?骞堕???ㄥ痉宸?浠???Texas Instruments 锛?TI)??X-Fab?ュ??般??
绔??垮痉/渚?搴?澶?绉???绱?????锛?CuNi1,CuNi2,CuNi6,CuNi10,CuNi15,SiC锛?
?规??aliga锛?PRESTICE骞朵??????绉?寮???SiC宸ヨ?虹??浣??????夸唬?规?锛?瀹?涔?姣?浼?缁???涓???宸ヨ?烘?存??????????浣?????????????╀?璁╂?村???涓??????ュ??虹?浜?锛?浠?????楂?SiC??浜ч??????杩??ヨ?锛?杩?涔?涓????垮???颁???浣?SiC??浠锋?硷???璁歌?浼???浣??板???纭???浠锋?煎?50%??
SiC????缁?浠堕?や????涓?浜?杈?浣???娓╁害涓?锛?涔???互?ㄦ?撮???棰???涓??????浠???璁╁?????靛?浜у??寰?浠ヤ娇?ㄨ?灏????靛????垫?????朵?琚??ㄧ?浠讹???缁?浣垮?璁捐?浜哄???藉?ㄦ?村???绌洪?翠腑灏?瑁??村?缁?浠讹???浠?浣垮?朵???杞婚??绾よ???? Baliga璇达?PRESiCE宸ヨ?鸿?藉??拌?楂?浜ч??锛?骞朵弗?兼?у?朵骇??iC缁?浠剁???规?с??
缂?璇?锛?Susan Hong
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